Kazuki Dempoh

Title: Innovations in Film Forming Technology by Kazuki Dempoh

Introduction

Kazuki Dempoh is an accomplished inventor based in Yamanashi, Japan, recognized for his significant contributions to film forming technology. With a total of three patents to his name, his work has played a vital role in advancing manufacturing processes in various industries.

Latest Patents

Dempoh's most recent patents showcase his ingenuity in developing advanced film forming apparatuses. The first patent features a sophisticated system that includes a vacuum-evacuable processing chamber, a lower electrode for mounting a target substrate, and an upper electrode positioned to face the lower electrode. This invention is equipped with a gas supply unit that facilitates the introduction of a film forming source gas into a processing space, enabling the inefficient production of plasma. The voltage application unit is designed to apply a voltage from high frequency and DC power supplies. Notably, the switching unit enhances versatility by selectively switching the voltage applied to the upper electrode among high frequency, DC, and superimposed voltages.

Another innovative patent by Dempoh also pertains to film forming technology, featuring a different design. This apparatus includes a mounting table for substrate placement and a ceiling plate that defines a processing space above. The gas supply mechanism provided allows for the horizontal delivery of source gas to the processing space, with a unique incline in either the ceiling plate or mounting table that widens the gap between them in the gas flow direction.

Career Highlights

Kazuki Dempoh is employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics production equipment sector. His role at the company enables him to research and develop cutting-edge technologies that drive innovation in film forming processes.

Collaborations

Throughout his career, Dempoh has collaborated with talented coworkers such as Shinya Okabe and Takashi Mochizuki. This teamwork fosters an environment of creativity and problem-solving, significantly contributing to the advancements made in their field.

Conclusion

Kazuki Dempoh has established himself as a key figure in the field of film forming technology with his innovative patents. His work at Tokyo Electron Limited, along with valuable collaborations, continues to push the boundaries of invention, paving the way for future advancements in manufacturing technology.