Kanagawa, Japan

Kazuhisa Takao


Average Co-Inventor Count = 5.5

ph-index = 2

Forward Citations = 8(Granted Patents)


Company Filing History:


Years Active: 1994-2010

Loading Chart...
2 patents (USPTO):Explore Patents

Title: Kazuhisa Takao: Innovator in Gas Phase Reaction Processing

Introduction

Kazuhisa Takao is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of gas phase reaction processing, holding 2 patents that showcase his innovative approaches.

Latest Patents

His latest patents include an end point detection method and device, as well as a gas phase reaction processing apparatus equipped with an end point detection device. The end point detection method involves a catalyst arranged in a treatment chamber of a gas phase reaction processing apparatus, which is heated at high temperatures by supplying electric power. This method includes steps such as supplying electric power from a constant current source, detecting the electric potential difference across the catalyst, performing primary differentiation of the detected electric potential difference, and determining the end point of the treatment based on the primary differential value obtained. Additionally, his patent on the method and apparatus for processing a workpiece in plasma describes an electron cyclotron resonance plasma chemical vapor deposition system. This system features a reaction chamber for introducing a reaction gas, a table for supporting a semiconductor wafer, and a microwave oscillator for generating plasma to etch or deposit a film on the semiconductor wafer.

Career Highlights

Kazuhisa Takao has worked with notable companies such as Tokyo Ohka Kogyo Co., Ltd. and Japan Advanced Institute of Science and Technology. His experience in these organizations has contributed to his expertise in the field of gas phase reaction processing.

Collaborations

He has collaborated with esteemed colleagues, including Kazuto Obuchi and Satoshi Oya, further enhancing his contributions to the industry.

Conclusion

Kazuhisa Takao's innovative work in gas phase reaction processing and his valuable patents highlight his role as a significant inventor in this field. His contributions continue to influence advancements in technology and processing methods.

This text is generated by artificial intelligence and may not be accurate.
Please report any incorrect information to support@idiyas.com
Loading…