Company Filing History:
Years Active: 1994-2010
Title: Kazuhisa Takao: Innovator in Gas Phase Reaction Processing
Introduction
Kazuhisa Takao is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of gas phase reaction processing, holding 2 patents that showcase his innovative approaches.
Latest Patents
His latest patents include an end point detection method and device, as well as a gas phase reaction processing apparatus equipped with an end point detection device. The end point detection method involves a catalyst arranged in a treatment chamber of a gas phase reaction processing apparatus, which is heated at high temperatures by supplying electric power. This method includes steps such as supplying electric power from a constant current source, detecting the electric potential difference across the catalyst, performing primary differentiation of the detected electric potential difference, and determining the end point of the treatment based on the primary differential value obtained. Additionally, his patent on the method and apparatus for processing a workpiece in plasma describes an electron cyclotron resonance plasma chemical vapor deposition system. This system features a reaction chamber for introducing a reaction gas, a table for supporting a semiconductor wafer, and a microwave oscillator for generating plasma to etch or deposit a film on the semiconductor wafer.
Career Highlights
Kazuhisa Takao has worked with notable companies such as Tokyo Ohka Kogyo Co., Ltd. and Japan Advanced Institute of Science and Technology. His experience in these organizations has contributed to his expertise in the field of gas phase reaction processing.
Collaborations
He has collaborated with esteemed colleagues, including Kazuto Obuchi and Satoshi Oya, further enhancing his contributions to the industry.
Conclusion
Kazuhisa Takao's innovative work in gas phase reaction processing and his valuable patents highlight his role as a significant inventor in this field. His contributions continue to influence advancements in technology and processing methods.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.