Tokyo Ohka Kogyo Co., Ltd.

Japan Advanced Institute of Science and Technology

Kazuhisa Takao

Hiroshi Ikeda

Akira Uehara

Mitsuaki Minato

Hideki Matsumura

Atsushi Masuda

Kazuto Obuchi

Hironobu Umemoto

Kazutoshi Fujisawa

Satoshi Oya

An end point detection method in the case where a catalyst arranged in a treatment chamber of a gas phase reaction processing apparatus is heated at high temperature by supplying electric power thereto and the treatment is carried out by cracking a reaction gas by the catalyst heated at high temperature, comprises the steps of supplying the electric power to the catalyst from a constant current source, detecting electric potential difference between both ends of the catalyst, performing primary differentiation of the detected electric potential difference, and determining an end point of the treatment based on obtained primary differential value.

End point detection method, end point detection device, and gas phase reaction processing apparatus equipped with end point detection device

An electron cyclotron resonance plasma chemical vapor deposition system has a reaction chamber for introducing a reaction gas therein, the reaction chamber housing a table for supporting a semiconductor wafer. A microwave oscillator is connected to the reaction chamber through a waveguide for generating and introducing a microwave into the reaction chamber to produce a plasma in the reaction chamber for activating the reaction gas to etch or deposit a film on the semiconductor wafer in the reaction chamber. A pair of upper and lower coils is disposed around the reaction chamber for generating respective magnetic fields in opposite directions in the reaction chamber. The magnetic fields cancel out each other creating a region with substantially no flux density in the magnetic fields between the coils. A bias voltage is applied to the table to attract the plasma to the table in a uniform manner.

Method of and apparatus for processing a workpiece in plasma

Growing community of inventors

Kanagawa, Japan

Kazuhisa Takao