The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 19, 2010

Filed:

Aug. 22, 2006
Applicants:

Kazuhisa Takao, Kanagawa, JP;

Hiroshi Ikeda, Kanagawa, JP;

Hideki Matsumura, Ishikawa, JP;

Atsushi Masuda, Ishikawa, JP;

Hironobu Umemoto, Ishikawa, JP;

Inventors:

Kazuhisa Takao, Kanagawa, JP;

Hiroshi Ikeda, Kanagawa, JP;

Hideki Matsumura, Ishikawa, JP;

Atsushi Masuda, Ishikawa, JP;

Hironobu Umemoto, Ishikawa, JP;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An end point detection method in the case where a catalyst arranged in a treatment chamber of a gas phase reaction processing apparatus is heated at high temperature by supplying electric power thereto and the treatment is carried out by cracking a reaction gas by the catalyst heated at high temperature, comprises the steps of supplying the electric power to the catalyst from a constant current source, detecting electric potential difference between both ends of the catalyst, performing primary differentiation of the detected electric potential difference, and determining an end point of the treatment based on obtained primary differential value.


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