Company Filing History:
Years Active: 2020-2023
Title: Innovations by Katsuo Oki in Semiconductor Inspection Technology
Introduction
Katsuo Oki is a prominent inventor based in Tokyo, Japan, known for his contributions to semiconductor inspection technology. With a total of 3 patents, Oki has made significant advancements in the field, particularly in the analysis of fine-structured devices.
Latest Patents
Oki's latest patents include a semiconductor inspection device designed to detect abnormalities with high sensitivity during failure analysis. This device utilizes an electron optical system that radiates an electron beam to a sample placed on a sample stage. The measurement device captures output from a measurement probe in contact with the sample, allowing for precise analysis. The device operates by measuring the output during two distinct periods: one during the radiation of the electron beam and another after the radiation, enabling the calculation of measurement values based on the differences observed.
Another notable patent is the semiconductor inspection device and probe unit, which facilitates high-speed response analysis for defect analysis in fine-structured devices constituting large-scale integration (LSI). This device features a vacuum chamber, a sample table, and an electron optical system that emits an electron beam from above the sample. It also includes multiple probe units connected to external devices, enhancing the efficiency of defect analysis.
Career Highlights
Katsuo Oki is currently employed at Hitachi High-Tech Corporation, where he continues to innovate in semiconductor technology. His work has been instrumental in advancing the capabilities of semiconductor inspection devices, making them more effective and efficient.
Collaborations
Oki has collaborated with notable colleagues such as Masaaki Komori and Yasuhiko Nara, contributing to the development of cutting-edge technologies in the semiconductor industry.
Conclusion
Katsuo Oki's contributions to semiconductor inspection technology have significantly impacted the field, showcasing his expertise and innovative spirit. His patents reflect a commitment to enhancing the precision and efficiency of semiconductor analysis, solidifying his reputation as a leading inventor in this domain.