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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10782340 B1

PDFFull Text
Date of Patent:
Sep. 22, 2020

Filed:

Jul. 07, 2016

Dynamic response analysis prober device

Applicant:

Hitachi High-tech Corporation, Minato-ku, Tokyo, JP;

Inventors:

Masaaki Komori, Tokyo, JP;

Katsuo Oki, Tokyo, JP;

Yasuhiko Nara, Tokyo, JP;

Takayuki Mizuno, Tokyo, JP;

Assignee:

Hitachi High-Tech Corporation, Tokyo, JP;

Attorney:

Crowell & Moring LLP

Primary Examiner:

Jermele M Hollington

Int. Cl.
CPC ...
G01R 31/28 (2006.01); G01R 1/073 (2006.01); H01J 37/28 (2006.01); G02B 21/00 (2006.01); G01R 31/26 (2020.01);
U.S. Cl.
CPC ...
G01R 31/2889 (2013.01); G01R 1/073 (2013.01); G01R 31/2603 (2013.01); G01R 31/2879 (2013.01); G02B 21/00 (2013.01); H01J 37/28 (2013.01); G01R 31/2822 (2013.01); G01R 31/2841 (2013.01); H01J 2237/2008 (2013.01); H01J 2237/24592 (2013.01);
Abstract

The present invention relates to a prober device that shapes an input waveform of a dynamic electric signal to be input to one of probes, and observes an output waveform of the dynamic electric signal output through a sample, or preferably shapes the input waveform such that the output waveform of the dynamic electric signal output through the sample becomes approximately a pulse shape, when a response analysis of a dynamic signal is performed with respect to a fine-Structured device. With this, the response analysis of a high-speed dynamic signal equal to or greater than a megahertz level can be performed with respect to the fine-Structured device such as a minute transistor configuring an LSI.

Find Patent Forward Citations

Komori, Masaaki. (2020). Dynamic response analysis prober device (U.S. Patent No. 10782340). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10782340

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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