Company Filing History:
17 out of 35,670 
3 out of 355 
2 out of 256 Years Active: 1999-2011
Title: **Katsuhisa Yuda: Innovator in Vacuum Processing Technology**
Introduction
Katsuhisa Yuda, based in Tokyo, Japan, is a renowned inventor with a remarkable portfolio of 21 patents to his name. His groundbreaking work in the field of vacuum processing technology has led to significant advancements in plasma deposition processes, making an impact on various industries.
Latest Patents
Among his latest inventions, Yuda developed a **Vacuum Processing Apparatus**, which features a reactor and a partitioning plate designed with multiple through-holes. This innovative apparatus allows radicals to pass through while effectively separating the plasma generating space from the substrate process space. The process involves delivering gas into the plasma space, generating plasma, producing radicals, and subsequently delivering these radicals to the substrate for film deposition.
Another notable patent is the **Remote Plasma Apparatus for Processing Substrate with Two Types of Gases**. This plasma CVD apparatus employs a plate with perforated holes to create a separation between the plasma generation and processing regions. With an aperture ratio not exceeding five percent, the design prevents the backward flow of monosilane gas while enabling high-quality silicon dioxide film deposition on substrates.
Career Highlights
Throughout his career, Katsuhisa Yuda has worked with prominent organizations, including NEC Corporation, where he contributed significantly to the development of innovative processing technologies. His experience in the industry has greatly influenced his inventions and research direction.
Collaborations
Yuda has collaborated with esteemed colleagues such as Hiroshi Tanabe and Manabu Ikemoto, enhancing the innovation process through collaborative efforts. These partnerships have been vital in advancing their research and achieving groundbreaking results in vacuum processing technology.
Conclusion
Katsuhisa Yuda's contributions to the field of vacuum processing are significant, as evidenced by his extensive patent portfolio and continuous innovation. His work not only advances technology but also inspires future inventors in the domain of plasma processing and materials engineering.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.