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Leuven, Belgium

Kathleen Nafus

USPTO Granted Patents = 7

Average Co-Inventor Count = 3.5

ph-index = 3

Forward Citations = 81(Granted Patents)

Location History:

Austin, TX (US) (2006 - 2009)
Leuven, BE (2010 - 2022)

Company Filing History:

7 out of 10,295

Tokyo Electron Limited

Years Active: 2006-2022

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7 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11538684 - UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly (2022-12-27),

2. 10490402 - UV-assisted stripping of hardened photoresist to create chemical templates for directed self-assembly (2019-11-26),

3. 10438806 - Methods and system of using organosilicates as patterning films (2019-10-08),

4. 9418834 - System and methods for spin-on coating of self-assembled monolayers or periodic organosilicates on a substrate (2016-08-16),

5. 7673278 - Enhanced process yield using a hot-spot library (2010-03-02),

6. 7582414 - Method and system for drying a substrate (2009-09-01),

7. 7070915 - Method and system for drying a substrate (2006-07-04),

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