Karuppasamy Muthukamatchy

Title: Innovations of Karuppasamy Muthukamatchy

Introduction

Karuppasamy Muthukamatchy is a notable inventor based in Madurai, India. He has made significant contributions to the field of semiconductor technology, holding a total of four patents. His work focuses on enhancing the efficiency and functionality of robotic apparatus and semiconductor process tools.

Latest Patents

One of his latest patents is titled "Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools." This invention discloses a chamber component, such as an end effector body, coated with an ultrathin electrically-dissipative material. This coating provides a dissipative path from the coating to the ground, ensuring effective electrostatic dissipation. The coating is deposited using a chemical precursor deposition method, which allows for a uniform, conformal, and porosity-free application in a cost-effective manner. Additionally, the end effector body may include replaceable contact pads that are also coated with an electrically-dissipative material.

Another significant patent is for a "Robot apparatus including dual end effectors with variable pitch and methods." This invention describes a robot apparatus that features an upper arm capable of rotating about a first rotational axis, with a forearm rotatably coupled to the upper arm at a second rotational axis. The design includes a first wrist member and a second wrist member, both rotatably coupled to the forearm. These wrist members can rotate about a third rotational axis, allowing for variable pitch as the robot apparatus extends.

Career Highlights

Karuppasamy Muthukamatchy is currently employed at Applied Materials, Inc., where he continues to innovate in the field of semiconductor technology. His work has been instrumental in developing advanced solutions that enhance the performance of semiconductor manufacturing processes.

Collaborations

He collaborates with talented coworkers, including Rajkumar Thanu and Gayatri Natu, contributing to a dynamic and innovative work environment.

Conclusion

Karuppasamy Muthukamatchy is a distinguished inventor whose contributions to semiconductor technology and robotics are noteworthy. His patents reflect a commitment to innovation and excellence in his field.