Applied Materials, Inc.

Karuppasamy Muthukamatchy

Rajkumar Thanu

Prerna Sonthalia Goradia

Geetika Bajaj

David Fenwick

Jeff Hudgens

Darshan Thakare

Gayatri Natu

XiaoMing He

Sanni Seppaelae

Arun Dhayalan

Jennifer Y Sun

Jeffrey C Hudgens

Eran Weiss

Chandrakant M Sapkale

Jennifer Sun

Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.

Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools

A robot apparatus may include an upper arm adapted to rotate about a first rotational axis and a forearm rotatably coupled to the upper arm at a second rotational axis. A first wrist member may be rotatably coupled to the forearm at a third rotation axis. A second wrist member may be rotatably coupled to the forearm at the third rotation axis. A first end effector may be coupled to the first wrist member and a second end effector may be coupled to the second wrist member. The first wrist member and the second wrist member may be configured to rotate about the third rotational axis between a first pitch and a second pitch as a function of extension of the robot apparatus. Other apparatus and methods are disclosed.

Robot apparatus including dual end effectors with variable pitch and methods

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Madurai, India

Karuppasamy Muthukamatchy