The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Feb. 24, 2026

Filed:

Apr. 26, 2024
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventors:

Gayatri Natu, Mumbai, IN;

Geetika Bajaj, Mumbai, IN;

Prerna Goradia, Mumbai, IN;

Darshan Thakare, Thane West, IN;

David Fenwick, Los Altos Hills, CA (US);

Xiaoming He, Fremont, CA (US);

Sanni Seppaelae, Karlstein am Main, DE;

Jennifer Sun, Fremont, CA (US);

Rajkumar Thanu, Santa Clara, CA (US);

Jeff Hudgens, San Francisco, CA (US);

Karuppasamy Muthukamatchy, Bangalore, IN;

Arun Dhayalan, Austin, TX (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68757 (2013.01);
Abstract

A coated chamber component comprises a chamber component and a coating deposited on a surface of the chamber component, the coating comprising an electrically-dissipative material. The electrically-dissipative material is to provide a dissipative path from the coating to a ground. The coating is uniform, conformal, and has a thickness ranging from about 10 nm to about 900 nm.


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