The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 27, 2022
Filed:
Jun. 02, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Gayatri Natu, Mumbai, IN;
Geetika Bajaj, Mumbai, IN;
Prerna Goradia, Mumbai, IN;
Darshan Thakare, Maharashtra, IN;
David Fenwick, Los Altos Hills, CA (US);
XiaoMing He, Fremont, CA (US);
Sanni Seppaelae, Karlstein am Main, DE;
Jennifer Sun, Fremont, CA (US);
Rajkumar Thanu, Santa Clara, CA (US);
Jeff Hudgens, San Francisco, CA (US);
Karuppasamy Muthukamatchy, Madurai, IN;
Arun Dhayalan, Austin, TX (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Disclosed in some embodiments is a chamber component (such as an end effector body) coated with an ultrathin electrically-dissipative material to provide a dissipative path from the coating to the ground. The coating may be deposited via a chemical precursor deposition to provide a uniform, conformal, and porosity free coating in a cost effective manner. In an embodiment wherein the chamber component comprises an end effector body, the end effector body may further comprise replaceable contact pads for supporting a substrate and the contact surface of the contact pads head may also be coated with an electrically-dissipative material.