Company Filing History:
Years Active: 2019-2025
Title: Karthik Thimmavajjula Narasimha: Innovator in Integrated Circuit Fabrication
Introduction
Karthik Thimmavajjula Narasimha is a prominent inventor based in San Francisco, CA (US). He has made significant contributions to the field of integrated circuit fabrication, holding a total of 8 patents. His work focuses on advanced materials and processes that enhance the performance and reliability of semiconductor devices.
Latest Patents
One of Karthik's latest patents involves ultra-high modulus and etch selectivity boron-carbon hardmask films. This innovation relates to the fabrication of integrated circuits and provides techniques for the deposition of boron-carbon films on a substrate. The method includes flowing a hydrocarbon-containing gas mixture into a processing volume of a chamber with a heated substrate. The substrate temperature ranges from about 400 degrees Celsius to about 700 degrees Celsius. Additionally, a boron-containing gas mixture is introduced, and an RF plasma is generated to deposit a boron-carbon film on the heated substrate. The resulting boron-carbon film exhibits an elastic modulus of approximately 200 to 400 GPa and a stress range from about −100 MPa to about 100 MPa.
Career Highlights
Karthik is currently employed at Applied Materials, Inc., a leading company in the semiconductor industry. His work at Applied Materials has positioned him as a key player in the development of innovative materials and processes for integrated circuits. His expertise in this area has led to advancements that benefit the entire semiconductor manufacturing ecosystem.
Collaborations
Karthik has collaborated with notable colleagues, including Prashant Kumar Kulshreshtha and Kwangduk Douglas Lee. These collaborations have fostered a productive environment for innovation and have contributed to the success of their projects.
Conclusion
Karthik Thimmavajjula Narasimha is a distinguished inventor whose work in integrated circuit fabrication has led to significant advancements in the field. His contributions, particularly in the development of boron-carbon hardmask films, demonstrate his commitment to innovation and excellence in semiconductor technology.