Company Filing History:
Years Active: 1996-2003
Title: Kars Z Troost: Innovator in Particle-Optical Apparatus
Introduction
Kars Z Troost is a notable inventor based in Eindhoven, Netherlands. He has made significant contributions to the field of particle-optical apparatus, holding a total of 3 patents. His work focuses on advanced methods of X-ray analysis and the detection of secondary electrons in scanning electron microscopes.
Latest Patents
One of Troost's latest patents is a method of X-ray analysis in a particle-optical apparatus. This method allows for the elementary analysis of samples, such as semiconductor wafers, through electron irradiation and measurement of the generated X-rays. To achieve high spatial resolution, the invention involves forming two adjacent holes in the sample surface, with a thin separating wall that limits the interaction volume. The invention also addresses the issue of disturbing X-rays generated in the walls of the hole by incorporating a stopping material with a different elemental composition than that of the wall. For instance, if the wall contains silicon, the stopping material is preferably platinum or carbon.
Another significant patent involves a particle-optical apparatus that includes a detector for secondary electrons. In this design, the focusing device for the primary beam in a scanning electron microscope consists of a combination of a magnetic gap lens and a monopole lens. The secondary electrons released from the specimen are detected by a specially arranged detector in a field-free space, enhancing detector efficiency and field of vision.
Career Highlights
Kars Z Troost has worked with prominent companies, including U.S. Philips Corporation and FEI Company. His experience in these organizations has contributed to his expertise in the field of particle optics and electron microscopy.
Collaborations
Throughout his career, Troost has collaborated with notable colleagues such as Alexander Henstra and Karel D Van Der Mast. These collaborations have likely enriched his research and development efforts in innovative technologies.
Conclusion
Kars Z Troost is a distinguished inventor whose work in particle-optical apparatus has led to significant advancements in X-ray analysis and electron detection. His contributions continue to influence the field and inspire future innovations.