The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 1996
Filed:
Mar. 15, 1995
Kars Z Troost, Eindhoven, NL;
Alexander Henstra, Eindhoven, NL;
U.S. Philips Corporation, New York, NY (US);
Abstract
A primary beam in a scanning electron microscope (SEM) releases secondary electrons in the specimen to be studied. These electrons move back to the focusing lens against the direction of the primary beam, detection of these electrons taking place in the vicinity of said lens. A known detector comprises a Wien filter for deflecting the electrons from the optical axis to the actual detector. In accordance with the invention a SEM detector is provided with a double electric dipole. The latter leaves the primary beam undisturbed to a high degree, but very efficiently deflects the secondary electrons to the actual detector.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile