Location History:
- Amagasaki, JP (2012)
- Yamanashi, JP (2018)
- Nirasaki, JP (2019)
Company Filing History:
Years Active: 2012-2019
Title: Junya Miyahara: Innovator in Semiconductor Technology
Introduction
Junya Miyahara is a prominent inventor based in Yamanashi, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His innovative work focuses on methods that enhance the performance and efficiency of semiconductor devices.
Latest Patents
Miyahara's latest patents include a tungsten film forming method and a method of controlling the threshold of a transistor. The tungsten film forming method involves creating a tungsten film on a target substrate within a chamber under a depressurized atmosphere. This process utilizes tungsten chloride gas as a raw material and includes an SiH gas treatment to prepare the substrate. The subsequent steps involve the sequential supply of tungsten chloride gas and a reducing gas while purging the chamber's interior.
The method of controlling the threshold of a transistor involves forming a gate insulating film in the channel region of a metal-oxide-semiconductor (MOS) transistor. This process includes the formation of a first electrode layer and a second electrode layer containing a work function adjusting metal. An oxidation or nitridation treatment is then performed using a microwave plasma processing apparatus to control the threshold of the MOS transistor effectively.
Career Highlights
Miyahara is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work has been instrumental in advancing technologies that are critical for modern electronic devices. His innovative approaches have garnered attention and respect within the field.
Collaborations
Miyahara has collaborated with notable colleagues such as Kentaro Shiraga and Yutaka Fujino. Their combined expertise has contributed to the successful development of advanced semiconductor technologies.
Conclusion
Junya Miyahara's contributions to semiconductor technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the industry. His methods for improving tungsten film formation and transistor threshold control are paving the way for future advancements in electronics.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.