Junichi Nagata

Title: The Innovative Mind of Junichi Nagata

Introduction: Junichi Nagata, an inventor based in Kumamoto, Japan, has made significant contributions to the field of treatment apparatuses and methods. With a total of two patents to his name, Nagata's innovations focus on enhancing the processes involved in semiconductor manufacturing, particularly concerning wafer treatment.

Latest Patents: One of Nagata's latest patents revolves around a treatment apparatus and method that utilizes a gas supplied from a gas source. This gas is exposed to an atmosphere above a liquid surface in a tank and is subsequently directed around a wafer in a treatment chamber via a gas supply passage and a supply port. The design ensures that the gas flows uniformly from around the wafer to above its center before being discharged through an exhaust port at the top of the treatment chamber. Importantly, heat treatment is conducted on the wafer with the assistance of a heating mechanism, which allows for a predetermined post-exposure bake (PEB). By supplying a humidified gas into the treatment chamber, the method prevents drying, ensuring that the water in the resist is retained and enabling the formation of the required resist pattern on the wafer.

The second patent, a processing apparatus featuring a gas distributor, includes a reaction chamber and a workpiece-supporting section located within it. This innovative setup consists of a gas distributor designed to face the workpiece-supporting section, allowing it to distribute reaction gas efficiently to the workpiece. The gas supply operates under a predetermined pressure, while a drive mechanism facilitates the back-and-forth movement of the gas distributor relative to the workpiece. This adjusts both the speed of movement and the reaction gas flow rate, permitting precise control over the processing conditions.

Career Highlights: Junichi Nagata's professional journey includes prominent roles at Tokyo Electron Kyushu Limited and Tokyo Electron Limited, where he honed his skills in semiconductor technology. His work at these companies allowed him to implement his innovative ideas and further develop his inventions.

Collaborations: Throughout his career, Nagata collaborated with talented individuals such as Yuuji Kamikawa and Kimiharu Matsumura. These collaborations have played a crucial role in the successful development of his patents and have contributed to advancements in the field of semiconductor manufacturing.

Conclusion: Junichi Nagata is an inspiring figure in the realm of technological innovation, particularly in the semiconductor industry. His patents demonstrate a deep understanding of the complex processes involved in wafer treatment and processing. As he continues to innovate, the impact of his work is likely to resonate within the industry for years to come.