Company Filing History:
Years Active: 2002-2004
Title: Innovations of Jun-Yang Lai
Introduction
Jun-Yang Lai is a notable inventor based in Ping-Tung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving processes and materials used in semiconductor manufacturing.
Latest Patents
One of his latest patents is a wafer chuck designed for producing an inert gas blanket. This innovative wafer chuck is capable of generating an inert gas blanket from residual chemical vapor in the semiconductor process chamber. It features a plurality of mounting pins that support a wafer, forming a cavity between the wafer and the chuck's upper surface. Additionally, the design includes apertures in the sidewall to facilitate the flow of inert gas, effectively blocking harmful chemical vapors from damaging the wafer.
Another significant patent involves a method to enhance the adhesion of molding compounds. This method introduces an oxygen-rich film over the top surface of a passivation layer, which may consist of silicon dioxide or silicon nitride. The process includes depositing a layer of silicon oxide on a substrate, followed by a layer of plasma-enhanced silicon nitride, and finally an oxynitride layer. This innovative approach improves the overall performance of semiconductor devices.
Career Highlights
Jun-Yang Lai is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His work at this prestigious company has allowed him to contribute to cutting-edge technologies and advancements in semiconductor manufacturing.
Collaborations
He has collaborated with several talented individuals in his field, including Su-Yu Yeh and Huai-Tei Yang. These collaborations have fostered innovation and have led to the development of new technologies in semiconductor processes.
Conclusion
Jun-Yang Lai's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Ltd. highlight his role as an influential inventor in the industry. His innovative approaches continue to shape the future of semiconductor manufacturing.