Location History:
- Kumamoto, JP (2001 - 2003)
- Kikuyo-Machi, JP (2002 - 2003)
- Kumamoto-Ken, JP (2003)
- Kikuchi-gun, JP (2002 - 2004)
- Koshi-Machi, JP (2004 - 2009)
- Koshi, JP (2010 - 2011)
Company Filing History:
Years Active: 2001-2011
Title: **Jun Ookura: Pioneer in Temperature Control Innovations**
Introduction
Jun Ookura, an accomplished inventor based in Koshi-Machi, Japan, has made significant contributions to the field of temperature control systems. With an impressive portfolio of 15 patents, she has demonstrated her expertise and innovative thinking in advancing technologies critical for manufacturing processes.
Latest Patents
Among her latest innovations are two patented methods that focus on temperature control during heat processing in coating and developing systems for resist films. The first patent involves a temperature control method designed to ensure that the temperature of a hot plate matches the target temperature required during the heat processing of substrates. This method incorporates the acquisition of adjustment data to optimize the temperature increase rate, facilitating precise control throughout the substrate processing stages.
The second patent further refines temperature control through a two-step approach. The first step captures a stepped response waveform of substrate temperatures while systematically altering the target temperatures. This data is then utilized to create a detailed matrix that illustrates the relationship between the target temperatures and actual substrate temperatures. The second step focuses on calculating adjustment information necessary for maintaining optimal temperature distribution during the heat process.
Career Highlights
Jun Ookura is currently employed by Tokyo Electron Limited, a renowned company in the semiconductor manufacturing industry. Her role involves developing advanced temperature control technologies essential for enhancing the efficiency and effectiveness of semiconductor fabrication processes. With her robust technical background, Jun has helped to propel the company’s innovative capabilities in this highly competitive field.
Collaborations
Throughout her career, Jun has collaborated with esteemed colleagues, including Koji Harada and Tomohide Minami. These partnerships have facilitated shared knowledge and expertise, contributing to the successful development of groundbreaking temperature control methodologies.
Conclusion
Jun Ookura’s work exemplifies the spirit of innovation, particularly in the realm of temperature control for industrial applications. Her patents not only advance manufacturing processes but also pave the way for further research and development in the technology sector. As she continues to push the boundaries of invention, her contributions will undoubtedly leave a lasting impact on the industry and inspire future generations of inventors.