Jun Miyaji

Title: Innovations of Jun Miyaji

Introduction

Jun Miyaji is a notable inventor based in Fukuoka, Japan. He has made significant contributions to the field of electrostatic chucks, with a total of six patents to his name. His work focuses on enhancing the performance and manufacturing processes of these devices, which are crucial in various technological applications.

Latest Patents

Miyaji's latest patents include an innovative electrostatic chuck designed to maintain a smooth surface after exposure to plasma. This design protects materials, such as silicon wafers, from contamination by particles. The electrostatic chuck features a dielectric material composed of 99.4 wt % or more alumina and a controlled amount of titanium oxide. The chuck's volume resistivity is measured at 10^10 Ωcm at room temperature, with titanium oxide strategically segregated at the boundaries of the alumina particles. Another patent details a method for manufacturing an electrostatic chuck that includes a metal plate with an insulator film formed by thermal spraying and a dielectric substrate with an electrode. This design ensures effective bonding and functionality while maintaining a thickness of 0.6 mm or less for the insulator film.

Career Highlights

Throughout his career, Jun Miyaji has worked with prominent companies such as Toto Ltd. and Canon Anelva Corporation. His experience in these organizations has allowed him to refine his expertise in the development of advanced electrostatic chucks.

Collaborations

Miyaji has collaborated with notable colleagues, including Osamu Okamoto and Noriaki Tateno. These partnerships have contributed to the advancement of his innovative projects and patents.

Conclusion

Jun Miyaji's contributions to the field of electrostatic chucks demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of materials and manufacturing processes, positioning him as a significant figure in his industry.