Ju-Shi Chen

Title: Ju-Shi Chen: Innovator in Semiconductor Technology

Introduction

Ju-Shi Chen is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the development of advanced bonding methods for integrated circuits. With a total of 3 patents, his work is paving the way for innovations in 3D integrated circuits (3DIC).

Latest Patents

Ju-Shi Chen's latest patents focus on enhancing the yield and performance of hybrid bonding in semiconductor wafers. One of his notable inventions is a method for improving hybrid bond yield for semiconductor wafers forming 3DIC devices. This method involves the use of first and second wafers with dummy and main metal patterns deposited during back-end-of-line (BEOL) processing. The design allows for high dummy metal surface coverage, which, combined with slotted conductive pads, improves the planarization of wafer surfaces. This results in wafers with minimal topographic differentials, facilitating better hybrid bonding.

Another significant patent involves a hybrid bond using a copper alloy for yield improvement. This integrated circuit (IC) features a pair of vertically stacked semiconductor structures, each comprising corresponding dielectric layers and metal features. The metal features utilize a copper alloy, enhancing the bond at the interface between the semiconductor structures. This innovative approach not only strengthens the bond but also addresses voids between copper grains, ensuring a robust connection.

Career Highlights

Ju-Shi Chen is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His expertise in semiconductor technology has positioned him as a key player in the development of cutting-edge solutions for modern electronics.

Collaborations

Throughout his career, Ju-Shi Chen has collaborated with talented individuals such as Chun-Chieh Chuang and Ching-Chun Wang. These collaborations have fostered an environment of innovation and creativity, contributing to the advancement of semiconductor technologies.

Conclusion

Ju-Shi Chen's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His work continues to drive advancements in 3DIC and hybrid bonding methods, showcasing the importance of innovation in the semiconductor industry.