This inventor holds 2 USPTO granted patents and 1 EPO patent. Top assignee: Tokyo Electron Limited. Active years: 2003-2005.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2003-2005
Title: Jozsef Michael Iha: Innovator in Semiconductor Wafer Manipulation
Introduction
Jozsef Michael Iha is a notable inventor based in Gold Canyon, AZ (US). He has made significant contributions to the field of semiconductor technology, particularly in the manipulation of semiconductor wafers. With a total of 2 patents, his work has advanced the efficiency and effectiveness of wafer handling systems.
Latest Patents
Iha's latest patents focus on apparatus and methods for manipulating semiconductor wafers. The first patent describes a wafer handling system that includes an end effector with a vacuum chuck, an internal vacuum plenum, and flow diverters. These components work together to define vacuum distribution channels that are in fluid communication with the vacuum ports of the vacuum chuck. The invention allows for the adjustment of vacuum pressure supplied to the vacuum ports, ensuring that as some ports are occluded by the wafer, the pressure is preferentially applied to unblocked ports. This innovation is particularly useful for securing thin semiconductor wafers that exhibit significant warpage.
The second patent also addresses similar concepts, emphasizing the importance of flow diverters positioned within the vacuum plenums. This design enhances the ability to manipulate wafers effectively, ensuring a secure engagement through the use of a gas dispensing showerhead that can flatten the wafer above the vacuum chuck.
Career Highlights
Jozsef Michael Iha is associated with Tokyo Electron Limited, a leading company in the semiconductor industry. His work has been instrumental in developing advanced technologies that improve wafer handling processes.
Collaborations
Iha has collaborated with notable colleagues, including Michael James Lombardi and John McIntee, contributing to the innovative environment at Tokyo Electron Limited.
Conclusion
Jozsef Michael Iha's contributions to semiconductor wafer manipulation demonstrate his expertise and commitment to innovation in the field. His patents reflect a deep understanding of the challenges in wafer handling and provide effective solutions for the industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile