John Preston Benedict

Title: Innovations of John Preston Benedict

Introduction

John Preston Benedict is a notable inventor based in New Paltz, NY (US). He holds a total of 4 patents that showcase his contributions to the field of technology and engineering. His work primarily focuses on methods that enhance the performance and efficiency of semiconductor devices.

Latest Patents

One of his latest patents is titled "Method of reducing erosion of a nitride gate cap layer during reactive ion etch of nitride liner layer for bit line contact of DRAM device." This innovation improves the etch rate of a nitride liner layer relative to that of a nitride cap layer. The nitride liner layer is strategically located at an exposed portion of a substrate adjacent to a stacked structure, while the nitride cap layer is positioned atop the stacked structure. An oxide spacer is formed along the sidewalls of the stacked structure, allowing the nitride liner layer to be patterned and etched to create at least one opening to the substrate, all while keeping the nitride cap layer substantially intact.

Another significant patent by Benedict is the "Method of depositing a multilayer thin film by means of magnetron sputtering which controls the magnetic field." This method involves preparing a magnetron sputtering system equipped with a magnetic field generation unit. The process includes mounting a composite material as a target on the cathode, providing a substrate on the anode, and filling the chamber with inert gas. By applying either DC or RF power along with an alternating magnetic field, the method allows for control over the cycle and intensity of the magnetic field, thereby adjusting the ratio of the components of the thin film in its thickness direction.

Career Highlights

Throughout his career, John Preston Benedict has worked with prominent companies such as IBM and Kabushiki Kaisha Toshiba. His experience in these organizations has significantly contributed to his expertise in semiconductor technology and innovation.

Collaborations

Benedict has collaborated with notable individuals in his field, including David M Dobuzinsky and Philip L Flaitz. These collaborations have likely enriched his work and led to further advancements in technology.

Conclusion

John Preston Benedict's contributions to the field of technology through his patents and collaborations highlight his innovative spirit and dedication to improving semiconductor devices. His work continues to influence advancements in the industry.