John D Greene

Title: **John D Greene: Innovating Wafer Inspection Technologies**

Introduction

John D Greene, an accomplished inventor based in Santa Cruz, CA, has made significant contributions to the field of automated wafer inspection. With a total of 11 patents to his name, Greene's innovative work focuses on optimizing inspection speed and enhancing resolution in electronic systems. His patents have advanced the capabilities of inspection machines, demonstrating a commitment to improving semiconductor manufacturing processes.

Latest Patents

Among Greene's latest patents is a groundbreaking invention titled "Methods and apparatus for optimization of inspection speed by generation of stage speed profile and selection of care areas for automated wafer inspection." This patent discloses novel apparatus and methods aimed at generating a stage speed profile corresponding to the fastest inspection speed achievable while identifying specific care areas to be examined in detail by the inspection machine. The innovation may also assess inspection speed, coverage, and additional characteristics to determine the best trade-off between coverage and inspection time through a cost function.

Another notable invention by Greene is the "Electron-optical system for high-speed and high-sensitivity inspections." This patent introduces an electron beam column designed to significantly enhance resolution and throughput for inspecting manufactured substrates. It incorporates an electron gun, a scanner, an objective lens, and a detector, each playing a crucial role in achieving an optimal inspection process. Features include a gun lens with a flip-up pole piece configuration and a dual scanner architecture to maximize performance.

Career Highlights

Greene has had an impressive career, having worked for leading companies in the semiconductor industry, including Kla Tencor Corporation and Kla-Tencor Technologies Corporation. His expertise in wafer inspection technologies has made him a valuable asset to these organizations, where he has collaborated on various innovative projects.

Collaborations

Throughout his career, John D Greene has collaborated with other notable professionals in the field, including Curt H Chadwick and Robert R Sholes. These partnerships have facilitated the development of cutting-edge technologies and have contributed to the growth of innovative solutions in semiconductor inspection.

Conclusion

John D Greene is a pioneer in wafer inspection technology. His extensive patent portfolio and collaboration with industry peers highlight his commitment to improving the efficiency and effectiveness of semiconductor manufacturing processes. As the industry continues to evolve, Greene's contributions will undoubtedly influence future innovations in the field.