Company Filing History:
Years Active: 2022-2023
Title: Innovations by Johannes Weichart
Introduction
Johannes Weichart is a notable inventor based in Balzers, Liechtenstein. He has made significant contributions to the field of plasma technology, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of etching processes in semiconductor manufacturing.
Latest Patents
One of his latest patents is the RF capacitive coupled etch reactor. In this invention, the smaller electrode is predominantly etched, while the surface of the larger electrode is increased by a body, such as a plate, which is on the same electric potential as the larger electrode and immersed in the plasma space. This design includes a pattern of openings that allows plasma to burn, thereby controlling the distribution of the etching effect on a substrate placed on the smaller electrode. Another significant patent is the vacuum plasma workpiece treatment apparatus. In this plasma reactor, a pumping compartment is separate from a plasma-treating compartment by a structure that includes a central frame. The frame is suspended to the casing of the reactor via spokes, allowing free expansion and contraction under thermal loading. The slits between the spokes prevent plasma ignition and provide a small flow resistance between the treatment compartment and the pumping compartment. Additionally, the frame may act as a downholding member for a substrate on the smaller electrode.
Career Highlights
Johannes Weichart is currently employed at Evatec AG, where he continues to innovate in the field of plasma technology. His work has been instrumental in advancing the capabilities of etching reactors, which are crucial for semiconductor fabrication.
Collaborations
He collaborates with several professionals in his field, including Jurgen Weichart and Jürgen Weichart, who contribute to the innovative environment at Evatec AG.
Conclusion
Johannes Weichart's contributions to plasma technology through his patents and work at Evatec AG highlight his role as a significant inventor in the industry. His innovations continue to shape the future of semiconductor manufacturing.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.