Location History:
- Isserstedt, DE (2008 - 2010)
- Jena, DE (2012)
Company Filing History:
2 out of 10 
1 out of 20 Years Active: 2008-2012
Title: Innovations of Joachim Heinitz
Introduction
Joachim Heinitz is a notable inventor based in Isserstedt, Germany. He has made significant contributions to the field of lithography, particularly in the semiconductor industry. With a total of 3 patents to his name, Heinitz has developed innovative solutions that enhance the efficiency and precision of substrate illumination.
Latest Patents
One of his latest patents is an arrangement for the illumination of a substrate with a plurality of individually shaped particle beams for high-resolution lithography of structure patterns. This invention aims to provide a novel method for illuminating substrates using controllable particle beamlets, allowing for high-resolution structuring without compromising substrate throughput. Another significant patent is the multi-beam modulator for a particle beam, which generates multiple individual beams from a single particle beam. This modulator is designed to illuminate the substrate effectively, utilizing a matrix of aperture groups to enhance the structuring process.
Career Highlights
Throughout his career, Joachim Heinitz has worked with prominent companies in the field, including Vistec Electron Beam GmbH and Leica Microsystems Lithography GmbH. His experience in these organizations has contributed to his expertise in developing advanced lithography technologies.
Collaborations
Heinitz has collaborated with notable colleagues such as Hans-Joachim Doering and Thomas Elster, further enriching his work and contributions to the field.
Conclusion
Joachim Heinitz's innovative patents and career achievements highlight his significant role in advancing lithography technology. His work continues to influence the semiconductor industry, showcasing the importance of innovation in this field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.