Location History:
- Kaoshing, TW (2000 - 2002)
- Hsin-Chu, TW (2001 - 2004)
Company Filing History:
Years Active: 2000-2004
Title: Jiunn-Der Yang: Innovator in Semiconductor Technology
Introduction
Jiunn-Der Yang is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His innovative approaches have advanced manufacturing processes in the semiconductor industry.
Latest Patents
One of Jiunn-Der Yang's latest patents is a method for spin etching sidewall spacers by acid vapor. This method allows for the formation of sidewall spacers on a semiconductor substrate without the need for conventional plasma etching. The process involves providing a semiconductor substrate with a gate structure, depositing a dielectric material layer, and rotating the substrate while applying acid vapor until the sidewall spacers are formed. The dielectric materials used can include SiO, SiON, or Si3N4, and the acid vapor may be derived from HF, H3PO4, H2SO4, or HCl. In a preferred embodiment, the substrate is rotated at speeds between 100 rpm and 150 rpm for a duration of 10 to 20 seconds.
Another notable patent is a method and system for yield loss analysis by yield management system. This innovation provides a comprehensive approach to analyzing yield loss during the manufacturing of semiconductor wafers. The method includes visually inspecting semiconductor devices to identify defects, calculating defective die counts at various manufacturing stages, and plotting trends to determine the killer stage of production. This analysis helps in optimizing the manufacturing process and improving overall yield.
Career Highlights
Jiunn-Der Yang is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His work focuses on enhancing manufacturing techniques and improving product quality through innovative methods.
Collaborations
Jiunn-Der Yang collaborates with esteemed colleagues such as Renn-Shyan Yeh and Chao-Hsin Chang. Their combined expertise contributes to the advancement of semiconductor technologies and the development of new methodologies.
Conclusion
Jiunn-Der Yang's contributions to semiconductor technology through his patents and innovative methods have significantly impacted the industry. His work continues to pave the way for advancements in manufacturing processes and product quality.