Jin Yeong Sung

Title: Jin Yeong Sung: Semiconductor Processing Inventor

Introduction

Jin Yeong Sung is an inventor based in Gyeonggi-do, South Korea. His work includes inventions for substrate processing, with a focus on process control and photoresist development. He is associated with Semes Co., Ltd. and Samsung Electronics. His patent portfolio includes 4 patents.

Latest Patents

Sung’s listed patents address substrate-processing equipment and methods.

“Control Device and Substrate Processing Apparatus Including the Same” describes equipment that supports and rotates a substrate while applying processing fluid and a beam. A controller uses a second substrate bearing anchor patterns to correct position errors in a swing arm, helping accurately position the beam-correction unit.

“Apparatus and Method for Processing Substrate” presents a sequence for rinsing a substrate after applying an organic developing solution. The method changes the rotation speed as a nonpolar rinse solution replaces and rinses away the developer, aiming to limit additional reactions with the photoresist film and reduce photoresist remnants.

Career Highlights

Sung’s reported company affiliations include Semes Co., Ltd. and Samsung Electronics. The patent descriptions provided highlight his contributions to substrate-processing apparatus and process methods.

Collaborations

His listed coworkers include Ki Hoon Choi and Anton Koriakin.

Conclusion

Jin Yeong Sung’s reported inventions focus on improving substrate-processing control and reducing unwanted reactions during photoresist development and rinsing.