The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2026
Filed:
Jul. 15, 2022
Semes Co., Ltd., Chungcheongnam-do, KR;
Jae Won Shin, Gyeonggi-do, KR;
Jae Seong Lee, Gyeonggi-do, KR;
Hae Won Choi, Daejeon, KR;
Joon Ho Won, Gyeonggi-do, KR;
Koriakin Anton, Chungcheongnam-do, KR;
Min Woo Kim, Seoul, KR;
Hyung Seok Kang, Gyeonggi-do, KR;
Eung Su Kim, Gyeonggi-do, KR;
Pil Kyun Heo, Gyeonggi-do, KR;
Jin Yeong Sung, Gyeonggi-do, KR;
SEMES CO., LTD., Chungcheongnam-do, KR;
Abstract
The present disclosure relates to a flow resistance generating unit that generates a flow resistance in a pipe to solve a flow imbalance problem due to a bent pipe and stabilizes an internal airflow, and a substrate treating apparatus including the same. The substrate treating apparatus comprises a fluid supply unit for supplying fluid for treating a substrate and including an upper fluid supply module for supplying the fluid to an upper portion of the substrate, a lower fluid supply module for supplying the fluid to a lower portion of the substrate, and a supply pipe connected to at least one of the upper fluid supply module and the lower fluid supply module, and a flow resistance generating unit installed in the supply pipe and for generating a flow resistance with respect to the fluid passing through the supply pipe.