The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 09, 2026
Filed:
Nov. 06, 2023
Applicant:
Semes Co., Ltd., Cheonan-si, KR;
Inventors:
Jin Yeong Sung, Hwaseong-si, KR;
Ki Hoon Choi, Cheonan-si, KR;
Hyun Yoon, Seoul, KR;
Sang Hyeon Ryu, Yangpyeong, KR;
Young Ho Park, Incheon-si, KR;
Assignee:
Semes Co., LTD., Cheonan-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10P 72/00 (2026.01); H10P 72/76 (2026.01);
U.S. Cl.
CPC ...
H10P 72/0421 (2026.01); H10P 72/0436 (2026.01); H10P 72/7618 (2026.01);
Abstract
The inventive concept provides a substrate treating method for etching a specific region on a substrate. The substrate treating method includes supplying a treating liquid to the substrate; and irradiating a laser to the specific region to locally heat the specific region; and wherein at the irradiating the laser, the laser is irradiated a plurality of times within the specific region, and the laser is irradiated to a region which does not overlap on the substrate, but which overlaps within the specific region.