Jin-Won Jun

Title: Innovations of Jin-Won Jun in Semiconductor Technology

Introduction

Jin-Won Jun is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on methods that enhance the efficiency and effectiveness of semiconductor devices.

Latest Patents

One of Jin-Won Jun's latest patents is a method of forming a metal gate in a semiconductor device. This innovative approach involves creating a gate insulation pattern and a dummy gate pattern on a substrate. An insulation interlayer is then formed to cover the dummy gate pattern, which is polished to expose the top surface of the dummy gate. The selective removal of the dummy gate pattern allows for the formation of a trench on the substrate. A gate spacer is created on the inner sidewall of the trench to determine the gate length of the metal gate. Finally, a metal layer is deposited and polished to fill the trench, enabling a reduction in gate length beyond the resolution limit of the photolithography exposing system.

Another significant patent by Jin-Won Jun is a method of forming dual damascene interconnection using low-k dielectric. This method employs a low-k dielectric organic polymer as an insulating layer. By utilizing only one hard mask layer, the process prevents ashing damage to the insulating layer. The inclusion of an etch-stop layer, differing in etch rate from that of a self-aligned spacer, allows for the formation of a via hole smaller than the resolution limit of the photolithographic process. This simplification of the process eliminates the photoresist tail phenomenon, enhancing overall efficiency.

Career Highlights

Jin-Won Jun is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has positioned him as a key player in advancing semiconductor technologies.

Collaborations

Throughout his career, Jin-Won Jun has collaborated with notable colleagues, including Jeong-Ho Shin and Kong-soo Cheong. These collaborations have contributed to the development of innovative solutions in semiconductor technology.

Conclusion

Jin-Won Jun's contributions to semiconductor technology through his patents and work at Samsung Electronics Co., Ltd. highlight his role as a significant inventor in the field. His innovative methods continue to push the boundaries of what is possible in semiconductor device manufacturing.