Jin Ki Jung

Title: Innovations of Jin Ki Jung in Semiconductor Technology

Introduction

Jin Ki Jung is a notable inventor based in Busan, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on methods that enhance the fabrication processes of semiconductor devices.

Latest Patents

Jin Ki Jung's latest patents include a method for fabricating metal wire of semiconductor devices. This method involves several steps, including depositing a barrier metal layer on an insulating film and subjecting it to SF.sub.6 plasma treatment. The process continues with the formation of an aluminum metal layer, a reflection-preventive layer, and a photoresist film pattern. The etching of these layers results in the formation of a metal wire, with the photoresist film pattern acting as an etch mask. Notably, the SF.sub.6 plasma treatment leaves no residue on the insulating film during etching, as silicon nodule growth occurs on the barrier metal layer when the aluminum metal layer is deposited. Another significant patent is a method for forming a via hole in multiple metal layers of semiconductor devices. This method includes forming a barrier layer beneath the photoresistive layer, which prevents polymer residue from forming on the metal-layer pattern and the side wall of the via hole during the plasma etching process.

Career Highlights

Jin Ki Jung is currently employed at Hyundai Electronics Industries Co. Ltd., where he continues to innovate in semiconductor technology. His work has been instrumental in advancing the efficiency and effectiveness of semiconductor fabrication processes.

Collaborations

Jin Ki Jung collaborates with talented individuals such as Mi Young Kang and Gon Son, contributing to a dynamic and innovative work environment.

Conclusion

Jin Ki Jung's contributions to semiconductor technology through his patents and work at Hyundai Electronics Industries Co. Ltd. highlight his role as a key innovator in the field. His methods for fabricating metal wires and forming via holes in semiconductor devices are paving the way for advancements in technology.