Hyundai Electronics Industries Co. Ltd.

Jin Ki Jung

Gon Son

Mi Young Kang

A method for fabricating a metal wire of semiconductor devices is provided and comprises the steps of: depositing a barrier metal layer on an insulating film and subjecting the barrier metal layer to SF.sub.6 plasma treatment; forming an aluminum metal layer, a reflection-preventive layer and a photoresist film pattern on the surface of the barrier metal layer, in order; etching the reflection-preventive layer, the aluminum metal layer and the barrier metal layer to form a metal wire, with the photoresist film pattern serving as an etch mask; and removing the photoresist film pattern. The SF.sub.6 plasma treatment leaves no residue on the insulating film 2 during etching, as silicon nodule grows a little on the barrier metal layer when the aluminum metal layer is deposited thereon.

Method for fabricating metal wire of semiconductor device

A method for forming a via hole in multiple metal layers of the semiconductor device is disclosed. In a via hole forming process of the semiconductor device, a barrier layer is formed beneath the photoresistive layer. Accordingly, the polymer residue formed on the metal-layer pattern and side wall of the via hole is prevented during the plasma etching process.

Growing community of inventors

Pusan, South Korea

Jin Ki Jung