Company Filing History:
Years Active: 2015-2018
Title: Jijen Vazhaeparambil: Innovator in Wafer Scanning Technology
Introduction
Jijen Vazhaeparambil is a notable inventor based in Saratoga, CA (US). He has made significant contributions to the field of wafer scanning technology, holding a total of 3 patents. His work focuses on enhancing imaging systems and illumination methods, which are crucial for semiconductor manufacturing.
Latest Patents
One of his latest patents is for a TDI sensor in a darkfield system. This innovative wafer scanning system includes imaging collection optics designed to reduce the effective spot size. A smaller spot size decreases the number of photons scattered by the surface, which is proportional to the area of the spot. Additionally, air scatter is minimized. The TDI technology is utilized to produce a wafer image based on multiple image signals integrated over the direction of linear motion of the wafer. An illumination system floods the wafer with light, while the imaging collection optics are responsible for creating the spot.
Another significant patent involves a laser with integrated multi-line or scanning beam capability. This method and system for providing illumination includes a laser with a predetermined wavelength. The process may involve beam splitting or beam scanning prior to frequency conversion. It also includes converting the frequency of each output beam and providing the frequency-converted output beam for illumination.
Career Highlights
Jijen Vazhaeparambil is currently employed at KLA-Tencor Corporation, a leading company in the semiconductor industry. His work at KLA-Tencor has allowed him to push the boundaries of wafer scanning technology and contribute to advancements in the field.
Collaborations
Throughout his career, Jijen has collaborated with talented individuals such as Guoheng Zhao and Christian Wolters. These collaborations have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Jijen Vazhaeparambil is a prominent inventor whose work in wafer scanning technology has led to significant advancements in the semiconductor industry. His innovative patents and contributions continue to shape the future of imaging systems.