The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 10, 2015
Filed:
Mar. 15, 2013
Kla-tencor Corporation, Milpitas, CA (US);
Zhiwei Xu, Sunnyvale, CA (US);
Christian Wolters, San Jose, CA (US);
Juergen Reich, Campbell, CA (US);
Bret Whiteside, Gilroy, CA (US);
Guoheng Zhao, Palo Alto, CA (US);
Jijen Vazhaeparambil, Saratoga, CA (US);
Stephen Biellak, Sunnyvale, CA (US);
Sam Shamouilian, San Jose, CA (US);
Mehdi Vaez-Iravani, Los Gatos, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
The disclosure is directed to a system and method for inspecting a spinning sample by substantially simultaneously scanning multiple spots on a surface of the sample utilizing a plurality of illumination beams. Portions of illumination reflected, scattered, or radiated from respective spots on the surface of the sample are collected by at least one detector array. Information associated with at least one defect of the sample is determined by at least one computing system in communication with the detector array. According to various embodiments, at least one of scan pitch, spot size, spot separation, and spin rate is controlled to compensate pitch error due to tangential spot separation.