The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2017
Filed:
Mar. 18, 2013
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Christian Wolters, San Jose, CA (US);
Jijen Vazhaeparambil, Saratoga, CA (US);
Dirk Woll, San Jose, CA (US);
Anatoly Romanovsky, Palo Alto, CA (US);
Bret Whiteside, Gilroy, CA (US);
Stephen Biellak, Sunnyvale, CA (US);
Guoheng Zhao, Palo Alto, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/10 (2006.01); G02B 26/12 (2006.01); G02B 27/10 (2006.01); G02F 1/01 (2006.01); G03F 7/20 (2006.01); G02F 1/35 (2006.01); H01S 3/00 (2006.01);
U.S. Cl.
CPC ...
G02B 27/1006 (2013.01); G02B 26/10 (2013.01); G02B 26/106 (2013.01); G02F 1/0105 (2013.01); G03F 7/7065 (2013.01); G02F 1/353 (2013.01); H01S 3/0071 (2013.01); H01S 3/0092 (2013.01);
Abstract
A method and system for providing illumination is disclosed. The method may include providing a laser having a predetermined wavelength; performing at least one of: beam splitting or beam scanning prior to a frequency conversion; converting a frequency of each output beam of the at least one of: beam splitting or beam scanning; and providing the frequency converted output beam for illumination.