Kumamoto, Japan

Jian Zhang


Average Co-Inventor Count = 2.9

ph-index = 1

Forward Citations = 3(Granted Patents)


Location History:

  • Kumamoto, JP (2018 - 2022)
  • Koshi, JP (2022 - 2023)

Company Filing History:


Years Active: 2018-2023

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4 patents (USPTO):Explore Patents

Title: The Innovative Contributions of Inventor Jian Zhang

Introduction: Jian Zhang is a prominent inventor based in Kumamoto, Japan, known for his significant contributions in the field of substrate processing technologies. With a total of four patents to his name, he has been actively involved in advancing methods that improve the efficiency and effectiveness of substrate processing.

Latest Patents: Jian Zhang's latest innovations include a substrate processing method that controls the discharge angle and position of processing liquid applied to the peripheral portion of a substrate. This method involves a sophisticated substrate processing apparatus designed to supply a processing liquid to a wafer being rotated. The setup features a rotating/holding unit that secures the wafer, a processing liquid discharging unit for delivering the liquid, and a variation acquiring unit that monitors deformation in the wafer’s peripheral region. The discharge controller intelligently adjusts the discharge angle and position based on real-time information from the variation acquiring unit to optimize processing.

Additionally, Zhang has also developed a substrate processing apparatus, method, and recording medium aimed at significantly shortening etching processing times. This invention includes a substrate processing tub intended for etching, a mixing unit that combines a new liquid with a silicon-containing compound, and a supply line that channels the mixed solution into the processing tub for improved efficiency.

Career Highlights: Jian Zhang works at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing sectors. His role involves spearheading innovative projects that push the boundaries of substrate processing technology and contribute to the company's success and growth in a competitive market.

Collaborations: Throughout his career, Jian Zhang has had the opportunity to collaborate with distinguished colleagues, including Tatsuhiro Ueki and Yoshifumi Amano. These collaborations enhance the inventive process and promote knowledge sharing, ultimately leading to groundbreaking innovations.

Conclusion: With his remarkable inventions and steadfast commitment to advancing substrate processing technologies, Jian Zhang is a key figure in the innovation landscape. His work not only exemplifies his dedication to the field but also significantly enriches the technological capabilities of the industry. As he continues to innovate, his contributions are sure to have a lasting impact on the future of substrate processing.

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