Company Filing History:
Years Active: 2017-2025
Title: Innovations of Jian-Yuan Su
Introduction
Jian-Yuan Su is a prominent inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on enhancing the efficiency and effectiveness of photolithography processes used in semiconductor manufacturing.
Latest Patents
One of Jian-Yuan Su's latest patents is titled "Reticle of Protecting from Particle Attacks." This invention features a reticle that includes a border section surrounding a pattern section, with gas openings arranged in and passing through the border section. These gas openings are connected to a gas supply and are designed to blow a pressurized gas away from the front surface of the reticle, creating an air wall that prevents particles from contaminating the reticle's surface.
Another notable patent is "Width Adjustment of EUV Radiation Beam." In this method, pattern formation information, including the pattern size on a reticle, is received. The width of an EUV radiation beam is then adjusted based on this information. The EUV radiation beam is scanned on the reticle, and a photo resist layer is exposed with a reflected EUV radiation beam. This innovation allows for greater intensity per unit area of the EUV radiation beam on the reticle after width adjustment.
Career Highlights
Jian-Yuan Su is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing technologies that are critical for modern electronics.
Collaborations
Throughout his career, Jian-Yuan Su has collaborated with notable colleagues, including Chi Ming Yang and Tsung-Hsun Lee. These partnerships have fostered innovation and contributed to the success of various projects within the semiconductor field.
Conclusion
Jian-Yuan Su's contributions to semiconductor technology through his innovative patents demonstrate his expertise and commitment to advancing the industry. His work continues to influence the development of efficient manufacturing processes in the semiconductor sector.