Jen-Hao Yang

Title: Innovations in Semiconductor Manufacturing by Inventor Jen-Hao Yang

Introduction

Jen-Hao Yang, a prominent inventor based in Taichung, Taiwan, has made significant contributions to the field of semiconductor manufacturing. With a total of two patents to his name, his work focuses on enhancing the processes involved in semiconductor device production.

Latest Patents

Jen-Hao Yang's latest patents include a "Deposition apparatus and method for manufacturing semiconductor device using the same" and a "Chemical vapor deposition apparatus and method for manufacturing semiconductor device using the same."

- The first patent presents a method for manufacturing a semiconductor device by introducing a gas into a chamber from a showerhead. This chamber is designed with a sidewall surrounding a pedestal, and pivotal to the process is the control of the showerhead's temperature, which is thermally connected to the chamber's sidewall, allowing for increased efficiency in temperature management during manufacturing.

- The second patent details a process that involves forming a transistor on a substrate where precursor gases are provided from the showerhead of a chemical vapor deposition (CVD) apparatus. This method includes creating a contact etch stop layer (CESL) that covers the transistor and substrate, while also controlling the temperature of the precursor gases within a specified range to optimize production quality.

Career Highlights

Jen-Hao Yang is currently associated with Taiwan Semiconductor Manufacturing Company Limited, one of the largest semiconductor manufacturers in the world. His role in advancing semiconductor technologies has been instrumental in improving device manufacturing processes, thereby contributing to the high standards expected in the industry.

Collaborations

Throughout his career, Jen-Hao has collaborated with notable colleagues, including Ren-Hua Guo and Ju-Ru Hsieh. These collaborations have allowed him to merge expertise and innovate further within the semiconductor field, amplifying the impact of their combined efforts.

Conclusion

In summary, Jen-Hao Yang is an exceptional inventor whose work in semiconductor manufacturing has led to valuable patents that enhance production techniques. His contributions continue to shape the industry, showcasing the importance of innovation in technology development.