Jason K Foster

Title: **The Innovations of Inventor Jason K. Foster**

Introduction

Jason K. Foster is a prominent inventor based in San Jose, California, renowned for his contributions to the field of semiconductor technology. With a total of four patents to his name, he has significantly advanced the processes involved in the development and manufacturing of 3D NAND structures, demonstrating a commitment to innovation and excellence in his work.

Latest Patents

Foster's latest inventions include the following:

1. **VNAND Tensile Thick TEOS Oxide** - This patent encompasses an advanced method for forming a dielectric film stack utilized for inter-level dielectric (ILD) layers in a 3D NAND structure. The method includes providing a substrate with a gate stack, followed by forming a first oxide layer using a specific RF power along with TEOS gas and an oxygen-containing gas. A subsequent oxide layer is then formed over the first, employing a different RF power and gas composition.

2. **Method and Apparatus of Processing Wafers with Compressive or Tensile Stress at Elevated Temperatures** - This patent showcases an innovative electrostatic chuck designed to maintain substrate flatness during high-temperature processing in a plasma reactor. The electrostatic chuck features a body composed of aluminum nitride, which optimizes chucking performance at temperatures around 600°C or higher, making it ideal for various deposition or etching processes.

Career Highlights

Currently, Foster is a key member of Applied Materials, Inc., a leader in materials engineering solutions. His work focuses on enhancing efficiency and effectiveness in semiconductor manufacturing, showcasing his dedication to technological advancements that improve industry standards.

Collaborations

Throughout his career, Foster has collaborated with skilled professionals, including colleagues Bok Hoen Kim and Michael Wenyoung Tsiang. Their combined expertise contributes to the innovative environment fostered at Applied Materials, where they work collaboratively on groundbreaking technologies that shape the future of semiconductor engineering.

Conclusion

Jason K. Foster stands out as a significant figure in the field of technology innovation. His patents reflect not only his inventiveness but also his commitment to pushing the boundaries of what is possible in semiconductor manufacturing. As he continues his work at Applied Materials, his contributions will undoubtedly resonate within the industry for years to come.