Jasmine Lin

Title: The Innovative Contributions of Jasmine Lin

Introduction

Jasmine Lin is a prominent inventor based in San Jose, CA. She has made significant contributions to the field of technology, particularly in the area of tungsten feature fill processes. With a total of 4 patents to her name, her work has advanced the understanding and application of materials in semiconductor manufacturing.

Latest Patents

One of Jasmine's latest patents focuses on "Tungsten feature fill with nucleation inhibition." This patent describes methods for filling features with tungsten while inhibiting tungsten nucleation. The innovative approach involves selective inhibition along a feature profile, which can be achieved by exposing the feature to ammonia vapor in a non-plasma process. Key process parameters such as exposure time, substrate temperature, and chamber pressure are utilized to fine-tune the inhibition profile. Additionally, her methods allow for the filling of multiple adjacent lines with reduced or no line bending, effectively minimizing sidewall growth during the feature fill process.

Career Highlights

Throughout her career, Jasmine has worked with notable companies in the semiconductor industry, including Novellus Systems Incorporated and Lam Research Corporation. Her experience in these organizations has equipped her with the skills and knowledge necessary to innovate in her field.

Collaborations

Jasmine has collaborated with talented individuals such as Anand Chandrashekar and Tsung-Han Yang. These partnerships have contributed to her success and the advancement of her research.

Conclusion

Jasmine Lin's contributions to the field of technology, particularly through her patents on tungsten feature fill processes, highlight her role as an influential inventor. Her work continues to impact the semiconductor industry and showcases the importance of innovation in advancing technology.