Jang Jung Lee

Title: Innovations of Jang Jung Lee

Introduction

Jang Jung Lee is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 10 patents. His work focuses on advanced techniques that enhance the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

One of Jang Jung Lee's latest patents is related to atom probe tomography specimen preparation. This patent discloses techniques for preparing an atom probe tomography (APT) specimen directly on a device under test (DUT) region on a wafer. The APT specimen is formed integrally with the substrate or support structure, such as a carrier. The process involves laser patterning to create a trench in the DUT and one or more bump structures within that trench. Following this, low-kV gas ion milling using dual-beam focused ion beam (FIB) microscopes shapes the bump structures into the APT specimen.

Another notable patent involves detection systems in semiconductor metrology tools. This invention describes a semiconductor metrology tool designed for analyzing samples. It includes a particle generation system, a local electrode, a particle capture device, a position detector, and a processor. The particle generation system is responsible for removing particles from a sample, while the local electrode creates an attractive electric field to direct the removed particles towards an aperture. The particle capture device generates a repulsive electric field to repel the removed particles towards the aperture, and the position detector determines the two-dimensional position coordinates and flight time of the particles. The processor then identifies the removed particles based on their flight time.

Career Highlights

Jang Jung Lee has established himself as a key figure in the semiconductor industry through his innovative work at Taiwan Semiconductor Manufacturing Company Limited. His expertise in semiconductor metrology and specimen preparation has positioned him as a valuable asset in the field.

Collaborations

Throughout his career, Jang has collaborated with notable colleagues, including Shih-Wei Hung and Dong Gui. These collaborations have further enhanced his contributions to semiconductor technology.

Conclusion

Jang Jung Lee's innovative patents and contributions to semiconductor technology demonstrate his significant impact on the industry. His work continues to influence advancements in semiconductor manufacturing processes.