Jairaj Joseph Payyapilly

Title: Innovations by Jairaj Joseph Payyapilly

Introduction

Jairaj Joseph Payyapilly is a notable inventor based in San Bruno, CA. He has made significant contributions to the field of electronic device manufacturing, holding a total of 5 patents. His work focuses on enhancing processes in substrate manufacturing, which is crucial for the production of electronic components.

Latest Patents

One of his latest patents is titled "Methods and mechanisms for adjusting process chamber parameters during substrate manufacturing." This invention describes an electronic device manufacturing system that can obtain metrology data from equipment within a process chamber. The system performs a deposition process on a substrate according to a process recipe, which includes various setting parameters. The deposition process results in multiple film layers on the substrate's surface. The system can generate a correction profile based on the metrology data and create an updated process recipe by applying this profile. Additionally, it can initiate an etch process on the substrate using the updated recipe.

Another significant patent by Payyapilly is "Methods and apparatus for in-situ protection liners for high aspect ratio reactive ion etching." This invention outlines methods for producing high aspect ratio features in a substrate through reactive ion etching. The process involves flowing acetylene gas into a chamber to create a diamond-like carbon deposition on a pattern mask or on oxide or nitride layers. A gas mixture is then introduced to form a plasma, which is used for anisotropic etching of the substrate layers.

Career Highlights

Jairaj Joseph Payyapilly is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work at Applied Materials has allowed him to develop innovative solutions that enhance manufacturing processes in the electronics industry.

Collaborations

Throughout his career, Payyapilly has collaborated with talented individuals such as Jong Mun Kim and Kenny Linh Doan. These collaborations have contributed to the advancement of technology in substrate manufacturing.

Conclusion

Jairaj Joseph Payyapilly's contributions to the field of electronic device manufacturing are noteworthy. His innovative patents and work at Applied Materials, Inc. demonstrate his commitment to advancing technology in this critical industry.