Round Rock, TX, United States of America

Jaime A Saravia


Average Co-Inventor Count = 5.7

ph-index = 3

Forward Citations = 141(Granted Patents)


Company Filing History:


Years Active: 1999-2001

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3 patents (USPTO):Explore Patents

Title: **Jaime A. Saravia – Innovator in Semiconductor Polishing Technologies**

Introduction

Jaime A. Saravia, a talented inventor based in Round Rock, TX, has made significant contributions to the field of semiconductor device manufacturing. With a total of three patents to her name, Jaime has demonstrated her expertise in developing innovative processes that enhance manufacturing efficiency and precision.

Latest Patents

Among Jaime's latest innovations is a patented process for polishing dissimilar conductive layers in a semiconductor device. This method optimizes the polishing of two dissimilar conductive materials independently while utilizing the same equipment, thereby improving manufacturing efficiency. The technique involves polishing tungsten and titanium layers using a single polisher with two distinct slurry formulations, specifically a ferric nitrate slurry and an oxalic acid slurry.

Another noteworthy patent is her low selectivity chemical mechanical polishing (CMP) process designed for metal layers containing a combination of wide, low density, and high density features. This method employs a hydrophilic polish pad with a hardness greater than 50 along with a specially formulated slurry containing silica and an acidic-based oxidizer. The result is a precise polishing outcome, yielding a selectivity ratio of less than 5:1, allowing for controlled polishing below the surface of the surrounding oxide.

Career Highlights

Jaime A. Saravia is currently employed at Motorola Corporation, where she continues to apply her innovative thinking to improve semiconductor manufacturing processes. Her work plays an essential role in advancing the capabilities of Motorola, ensuring that the company remains at the forefront of technology.

Collaborations

Throughout her career, Jaime has had the opportunity to collaborate with notable colleagues such as Rajeev Bajaj and David K. Watts. These partnerships have fostered an environment of innovation and creativity, allowing them to tackle complex challenges in semiconductor technology together.

Conclusion

Jaime A. Saravia stands out as a prominent figure in the semiconductor industry with her impressive patent portfolio and her ongoing commitment to innovation. Her insights and developments not only enhance manufacturing efficiency but also contribute to the advancement of semiconductor technology, establishing her as a leader in her field.

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