This inventor holds 7 USPTO granted patents and 1 published patent application. Top assignee: Samsung Electronics Co., Ltd.. Active years: 1999-2017.
Location History:
- Suwon, KR (1999)
- Kyungki-do, KR (1999)
- Seoul, KR (2014 - 2015)
- Anyang-si, KR (2017)
Company Filing History:
Years Active: 1999-2017
Title: Jae-woo Nam: Innovator in Integrated Circuit Technology
Introduction
Jae-woo Nam is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of integrated circuit technology, holding a total of 7 patents. His innovative methods have advanced the manufacturing processes in the electronics industry.
Latest Patents
Nam's latest patents include a method of forming fine patterns and a method of manufacturing integrated circuit devices using this technique. The method of forming a fine pattern involves creating pillar-shaped guides that are regularly arranged on a feature layer. This process includes forming a block copolymer layer around the guides, phase separating the layer, and forming first domains on the feature layer. The second domain is formed surrounding the first domains, and the first domains are then removed to create holes in the feature layer through etching. The block copolymer layer consists of a polymer blend with first and second polymer blocks, along with homopolymers.
Additionally, he has developed methods for forming holes using mask pattern structures. This method entails creating guide patterns on an object layer, which are physically spaced apart and have a ring shape with a first opening. A self-aligned layer is formed to fill the opening, and preliminary holes are created by removing portions of this layer. The object layer is then partially etched through these preliminary holes.
Career Highlights
Jae-woo Nam is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and contribute to the field of electronics. His work has been instrumental in enhancing the efficiency and effectiveness of integrated circuit manufacturing.
Collaborations
Nam has collaborated with notable coworkers, including Eun-sung Kim and Chul-Ho Shin, who have also contributed to advancements in the field.
Conclusion
Jae-woo Nam's contributions to integrated circuit technology through his innovative patents have positioned him as a key figure in the electronics industry. His work continues to influence the development of advanced manufacturing techniques.