Location History:
- Gyeonsangbuk-Do, KR (2008)
- Kimcheon-Si, KR (2013)
Company Filing History:
3 out of 60 
3 out of 15 Years Active: 2008-2013
Title: Innovations of Jae Hyun Jeon in Polishing Slurry Technology
Introduction
Jae Hyun Jeon is a notable inventor based in Gyeongsangbuk-Do, South Korea. He has made significant contributions to the field of semiconductor manufacturing, particularly in the development of polishing slurries used in chemical mechanical polishing processes. With a total of three patents to his name, Jeon has established himself as a key figure in advancing technologies that enhance the efficiency and effectiveness of semiconductor fabrication.
Latest Patents
Among his latest patents, Jeon has developed a polishing slurry and methods for producing the same. His innovations focus on creating a slurry specifically designed for chemical mechanical polishing, which is essential for flattening semiconductor laminates. One of his notable inventions provides a method of producing a slurry that exhibits high removal selectivity to nitride layers, which are used as barrier films in shallow trench isolation CMP processes. This is particularly crucial for fabricating ultra-highly integrated semiconductors, such as 256 mega D-RAM or more, with design rules of 0.13 micrometers or less. Additionally, his polishing slurry is characterized by a controlled particle size distribution, ensuring optimal performance and minimizing scratches on the polished surface.
Career Highlights
Throughout his career, Jae Hyun Jeon has worked with several companies, including K.C. Tech Co., Ltd. and Iucf-Hyu. His experience in these organizations has allowed him to refine his expertise in semiconductor technologies and polishing processes. Jeon's work has been instrumental in pushing the boundaries of what is possible in semiconductor manufacturing.
Collaborations
Jeon has collaborated with notable colleagues in the field, including Seok Min Hong and Yong Kim. These partnerships have contributed to the development of innovative solutions in polishing slurry technology.
Conclusion
Jae Hyun Jeon's contributions to the field of semiconductor manufacturing through his innovative polishing slurry technologies have made a significant impact. His patents reflect a deep understanding of the complexities involved in semiconductor fabrication, and his work continues to influence advancements in the industry.