Location History:
- Urbana, IL (US) (2005 - 2009)
- Freemont, CA (US) (2010)
- Fremont, CA (US) (2009 - 2017)
- San Francisco, CA (US) (2021 - 2023)
Company Filing History:
Years Active: 2005-2025
Title: Innovations by Jack Chen: A Trailblazer in Plasma Technology
Introduction
Jack Chen is a prolific inventor based in Fremont, California, with an impressive portfolio of 22 patents. His groundbreaking work focuses on advancements in plasma processing technologies, particularly in semiconductor substrate cleaning and etching. This article explores his latest patents, career highlights, and collaborations that have significantly impacted the field.
Latest Patents
Among his most recent innovations, Jack Chen holds patents for a "Tunable Upper Plasma-Exclusion-Zone Ring for a Bevel Etcher." This invention is designed to optimize the distance of plasma during processing in a chamber. The PEZ ring features a unique structure with a lower surface that includes a horizontal portion and an upwardly tapered conical outer portion, enabling the adjustment of plasma treatment distances for 300 mm circular substrates. His innovation ensures precision in cleaning and processing, allowing the extent of the bevel edge to be adjusted radially both inward and outward during the bevel cleaning process using radio frequency power sources. This technology marks a significant advancement in semiconductor manufacturing efficiency.
Career Highlights
Jack Chen has made substantial contributions through his work at various prestigious organizations. He has worked with Lam Research Corporation, a leading provider of semiconductor manufacturing equipment. His role there was pivotal in developing advanced plasma processing techniques that are fundamental in the semiconductor fabrication process. Additionally, his experience at the University of Illinois has allowed him to bridge academia with industry, fostering innovation and research.
Collaborations
Throughout his career, Jack has collaborated with many talented professionals, including Chang Po Liu and Andrew D Bailey, III. These collaborations have been essential in driving forward the technological advancements in his fields of expertise, combining their knowledge and skills to tackle complex challenges in semiconductor processing.
Conclusion
Jack Chen exemplifies innovation in the realm of plasma technology, with his extensive patent portfolio reflecting his dedication to advancing semiconductor processing. His latest inventions not only enhance the efficiency of manufacturing but also set new standards in the industry. As he continues to innovate and collaborate, the impact of his work will likely shape the future of semiconductor technologies.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.