The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 16, 2010
Filed:
Jun. 01, 2007
Applicants:
Chang Liu, Winnetka, IL (US);
Jonathan Engel, Minneapolis, MN (US);
Nannan Chen, Urbana, IL (US);
Jack Chen, Fremont, CA (US);
Inventors:
Chang Liu, Winnetka, IL (US);
Jonathan Engel, Minneapolis, MN (US);
Nannan Chen, Urbana, IL (US);
Jack Chen, Fremont, CA (US);
Assignee:
The Board of Trustees of the University of Illinois, Urbana, IL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 7/16 (2006.01);
U.S. Cl.
CPC ...
Abstract
A micromachined artificial sensor comprises a support coupled to and movable with respect to a substrate. A polymer, high-aspect ratio cilia-like structure is disposed on and extends out-of-plane from the support. A strain detector is disposed with respect to the support to detect movement of the support.