Company Filing History:
Years Active: 1993-1994
Title: Jack Berg: Innovator in Semiconductor Technology
Introduction
Jack Berg is a notable inventor based in Boise, ID (US), recognized for his contributions to semiconductor technology. With a total of 4 patents, he has made significant advancements in methods that enhance the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
One of Jack's latest patents is a method of eliminating metal voiding in a titanium nitride/aluminum layer. This invention addresses the issue of staining and voiding in aluminum layers caused by nitrogen cross-contamination during multi-chambered wafer processing. By introducing a pumping-out step in the aluminum layer sputtering chamber, Jack's method effectively removes nitrogen before the aluminum layer is deposited onto the silicon wafer. Additionally, he proposes reducing the deposition temperature to 310°C or less to prevent these issues.
Another significant patent is related to Ti/TiN/Ti contact metallization. This invention streamlines the contact metallization process on semiconductors by allowing the titanium and titanium nitride layers to be deposited in the same sputtering chamber. This innovation not only saves time and costs but also ensures that a silicide layer forms effectively during the sputtering process. An optional additional titanium layer can be formed to clean the titanium target used in the sputtering process, further enhancing the efficiency of the method.
Career Highlights
Jack Berg is currently employed at Zilog, Inc., where he continues to develop innovative solutions in semiconductor technology. His work has significantly impacted the industry, leading to more efficient manufacturing processes and improved product quality.
Collaborations
Jack has collaborated with notable coworkers, including Gregory Hindman and Peter N Manos, II. These partnerships have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.
Conclusion
Jack Berg's contributions to semiconductor technology through his patents and innovative methods have established him as a key figure in the field. His work continues to influence the industry, paving the way for future advancements in semiconductor manufacturing.