Company Filing History:

9 out of 10

Spectrum Cvd, Inc.

patents

3 out of 20,290

Motorola Corporation

patents

1 out of 832,891

Other

patents

Years Active: 1986-1990

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13 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 4966869 - Tungsten disilicide CVD (1990-10-30),

2. 4870245 - Plasma enhanced thermal treatment apparatus (1989-09-26),

3. 4861563 - Vacuum load lock (1989-08-29),

4. 4788416 - Direct wafer temperature control (1988-11-29),

5. 4777061 - Blanket tungsten deposition for dielectric (1988-10-11),

6. 4749597 - Process for CVD of tungsten (1988-06-07),

7. 4737474 - Silicide to silicon bonding process (1988-04-12),

8. 4692343 - Plasma enhanced CVD (1987-09-08),

9. 4640224 - CVD heat source (1987-02-03),

10. 4632057 - CVD plasma reactor (1986-12-30),

11. 4632056 - CVD temperature control (1986-12-30),

12. 4605947 - Titanium nitride MOS device gate electrode and method of producing (1986-08-12),

13. 4570328 - Method of producing titanium nitride MOS device gate electrode (1986-02-18),

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